General Info
Semitron MPR 1000 PAI shapes possess excellent heat resistance and low rates of outgassing and erosion in plasma chambers. This high-purity material with low ionic content is often chosen for vacuum chamber applications in the etch, CVD, and ion implant sub-segmentations of the semiconductor and electronics industry.
Semitron MPR 1000 PAI shows increased lifetime compared to traditional materials, for example, up to 25x that of polyimide in ozone in some cases. Due to its longevity, it is specified against traditional materials used in vacuum chamber applications such as quartz, ceramics, polyimides and other engineering plastics.
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Key Properties
- Low ionic content and low outgassing
- Excellent heat resistance
- Minimized rate of erosion in plasma chambers
- Optimal chip resistance, durability and machinability
- Engineered for demanding semiconductor chamber applications
Limitations
- PAI Materials have a relatively high moisture absorption rate, parts used in high temperature service or made to tight tolerances should be kept dry prior to installation.
- Thermal shock resulting in deformation can occur if moisture laden parts are rapidly exposed to temperatures above 400°F (205° C).
- Chemical Resistance to Strong Bases, Steam and Some High Temperature Acids
Applications
- Vacuum chambers that utilize oxygen plasma
- Clamp rings
- Trench rings
- Hangers
- Srew pins
- Shower heads
- Centering pins
- Focus rings
- Insulators
- Vacuum pads
- Wafer guides
Resin Trade Names
Manufacturer Trade Names
Boedeker Plastics, Inc. stocks & supplies plastic sheet, rod, tube, film and custom profiles and machine parts from these shapes that are produced from plastic resin. In many cases the manufacturer of the shape has their own product trade name. If your specification calls for a specific resin grade or manufacturer trade name, we can supply a shape made from that resin to meet your specification or suggest an equal. If you require a specific resin or brand it must be specified at the time of order.
Available Sizes
Made-to-Order Item - Minimums and longer lead times may apply; contact us for details.
Sheet
Thickness x W x L
9.53 mm (0.375 inch) x 305 mm (12.000 inch) x 610 mm (24.000 inch)
9.53 mm (0.375 inch) x 305 mm (12.000 inch) x 305mm (12.000 inch)
12.70 mm (0.500 inch) x 305 mm (12.000 inch) x 305mm (12.000 inch)
19.05 mm (0.750 inch) x 305 mm (12.000 inch) x 305mm (12.000 inch)
25.40 mm (1.000 inch) x 305 mm (12.000 inch) x 305mm (12.000 inch)
Rod
Diameter x L
6.35 mm (0.250 inch) x 2440 mm (96.062 Inch)
Tube
OD X ID X L
279.40 mm (11.000 inch) x 152.4 mm (6.000 inch) x 76 mm (3.000 inch)
279.40 mm (11.000 inch) x 228.60 (9.000 inch) mm x 76 mm (3.000 inch)
